EELS QUANTIFICATION NEAR THE SINGLE-ATOM DETECTION LEVEL

被引：44
|
作者：
KRIVANEK, OL [1 ]
MORY, C [1 ]
TENCE, M [1 ]
COLLIEX, C [1 ]
机构：
[1] GATAN RES & DEV,PLEASANTON,CA 94588
来源：
MICROSCOPY MICROANALYSIS MICROSTRUCTURES | 1991年 / 2卷 / 2-3期
关键词：
D O I：
10.1051/mmm:0199100202-3025700
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
Parallel-detection electron energy loss spectrometers are able to detect the EELS signal originating from only a few atoms on thin substrates. The instrumental requirements for attaining this level of performance, and the methodology for quantifying the results are described. For the case of small thorium clusters on a thin carbon film, the detection limit with currently available instrumentation is shown to be one atom.
引用
收藏
页码：257 / 267
页数：11
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