SOFT-X-RAY PRODUCTION FROM LASER-PRODUCED PLASMAS FOR LITHOGRAPHY APPLICATIONS

被引：46
|
作者：
SPITZER, RC
KAUFFMAN, RL
ORZECHOWSKI, T
PHILLION, DW
CERJAN, C
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1993年 / 11卷 / 06期
关键词：
D O I：
10.1116/1.586573
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Laser-produced plasmas are investigated as a source for soft x-ray projection lithography. The dependence of conversion efficiency on target material, intensity, wavelength, and pulse width is determined using absolutely calibrated detectors. Conversion efficiency greater than 1% into a 2.2 eV bandwidth is demonstrated for Sn targets, fulfilling the system source requirements.
引用
收藏
页码：2986 / 2989
页数：4
相关论文
共 50 条
  • [1] LASER-PRODUCED PLASMAS FOR SOFT-X-RAY PROJECTION LITHOGRAPHY
    SILFVAST, WT
    RICHARDSON, MC
    BENDER, H
    HANZO, A
    YANOVSKY, V
    JIN, F
    THORPE, J
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (06): : 3126 - 3133
  • [2] SOFT-X-RAY LITHOGRAPHY USING RADIATION FROM LASER-PRODUCED PLASMAS
    GOHIL, P
    KAPOOR, H
    MA, D
    PEKERAR, MC
    MCILRATH, TJ
    GINTER, ML
    [J]. APPLIED OPTICS, 1985, 24 (13): : 2024 - 2027
  • [3] SOFT-X-RAY IMAGING OF LASER-PRODUCED PLASMAS
    BENATTAR, R
    MALKA, V
    [J]. X-RAY INSTRUMENTATION IN MEDICINE AND BIOLOGY, PLASMA PHYSICS, ASTROPHYSICS, AND SYNCHROTRON RADIATION, 1989, 1140 : 73 - 84
  • [4] SOFT-X-RAY EMISSION OF CONTINUA FROM LASER-PRODUCED PLASMAS
    NICOLOSI, P
    JANNITTI, E
    TONDELLO, G
    [J]. APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1981, 26 (02): : 117 - 124
  • [5] SOFT-X-RAY EMISSION FROM SUBPICOSECOND LASER-PRODUCED PLASMAS
    KUHLKE, D
    HERPERS, U
    VONDERLINDE, D
    [J]. APPLIED PHYSICS LETTERS, 1987, 50 (25) : 1785 - 1787
  • [6] Soft-x-ray spectroscopy of subpicosecond laser-produced plasmas
    Krushelnick, KM
    Tighe, W
    Suckewer, S
    [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1996, 13 (02) : 395 - 401
  • [7] TECHNIQUES FOR SOFT-X-RAY ABSORPTION IN LASER-PRODUCED PLASMAS
    BURKHALTER, PG
    MEHLMAN, G
    NEWMAN, DA
    RIPIN, BH
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (10): : 2741 - 2743
  • [8] Soft-x-ray spectroscopy of subpicosecond laser-produced plasmas
    Princeton University, P. O. Box 451, Princeton, NJ 08544, United States
    不详
    [J]. J Opt Soc Am B, 2 (395-401):
  • [9] Picosecond soft-x-ray source from subpicosecond laser-produced plasmas
    Workman, J
    Maksimchuk, A
    Liu, X
    Ellenberger, U
    Coe, JS
    Chien, CY
    Umstadter, D
    [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1996, 13 (01) : 125 - 131
  • [10] Soft-x-ray emission dynamics in picosecond laser-produced plasmas
    Gizzi, LA
    Giulietti, A
    Willi, O
    Riley, D
    [J]. PHYSICAL REVIEW E, 2000, 62 (02): : 2721 - 2727
12345