ACID-CATALYZED SILANOL CONDENSATION REACTION-MECHANISM IN A CHEMICAL AMPLIFICATION NEGATIVE RESIST SYSTEM

被引：0
|
作者：
SHIRAISHI, H [1 ]
FUKUMA, E [1 ]
HAYASHI, N [1 ]
UENO, T [1 ]
TADANO, K [1 ]
IWAYANAGI, T [1 ]
机构：
[1] HITACHI LTD,CENT RES LAB,KOKUBUNJI,TOKYO 185,JAPAN
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1990年 / 200卷
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
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页码：354 / POLY
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