EDGE JUNCTION DC-SQUIDS FABRICATION WITH EPITAXIAL YBACUO THIN-FILMS

被引：0
|
作者：
ZENG, XH
HU, YF
JIANG, HM
LIU, RJ
DAI, YD
WANG, SG
机构：
[1] Department of Physics, Peking University, Beijing
来源：
PHYSICA C | 1991年 / 185卷
关键词：
D O I：
10.1016/0921-4534(91)91419-5
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
By DC and RF magnetron sputtering, we have deposited in-situ epitaxial YBaCuO(YBCO) and PrBaCuO(PBCO) thin film on(100)SrTiO3 substrate. After photolithography and ion beam etching, we fabricated edge junction DC SQUIDs with T(c) > 77K.PrBaCuO thin film worked as an insulator. The best SQUIDs with loop area 100 x 100-mu-m2 had flux noise 7.0 x 10(-4)-PHI-0/H(c)z1/2(0-1Hz) at 70K, which was equivalent to an energy resolution of 5.0 x 10(-27)J/Hz.
引用
收藏
页码：2591 / 2592
页数：2
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