STRUCTURE OF FILM PREPARED BY LOW ENERGY SPUTTERING OF MOLYBDENUM

被引：14
|
作者：
NAGATA, S
SHOJI, F
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 1971年 / 10卷 / 01期
关键词：
D O I：
10.1143/JJAP.10.11
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：11 / &
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