THERMODYNAMIC CALCULATION OF CONDITIONS OF SILICON HYDROXYNITRIDES PRECIPITATION FROM GAS-PHASE

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作者：
LAPENKOVA, SV
VARLAMOV, AG
SHIRYAEV, AA
GRIGOREV, YM
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来源：
ZHURNAL NEORGANICHESKOI KHIMII | 1992年 / 37卷 / 02期
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O61 [无机化学];
学科分类号：
070301 ; 081704 ;
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页码：403 / 410
页数：8
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