THERMODYNAMIC CALCULATION OF CONDITIONS OF SILICON HYDROXYNITRIDES PRECIPITATION FROM GAS-PHASE

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作者：

LAPENKOVA, SV

VARLAMOV, AG

SHIRYAEV, AA

GRIGOREV, YM

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ZHURNAL NEORGANICHESKOI KHIMII | 1992年 / 37卷 / 02期

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O61 [无机化学];

学科分类号：

070301 ; 081704 ;

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页码：403 / 410

页数：8

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