ELECTRON-GUN FOR THE PULSE ANNEALING OF DISTURBED SEMICONDUCTING LAYERS

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BOYARINTSEV, EL

DVURECHENSKII, AV

KASHNIKOV, BP

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ZHURNAL TEKHNICHESKOI FIZIKI | 1981年 / 51卷 / 05期

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O59 [应用物理学];

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页码：1044 / 1045

页数：2

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