NATURE OF VICINAL LASER-ANNEALED SI(111) SURFACES

被引:32
|
作者
CHABAL, YJ
ROWE, JE
CHRISTMAN, SB
机构
来源
PHYSICAL REVIEW B | 1981年 / 24卷 / 06期
关键词
D O I
10.1103/PhysRevB.24.3303
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
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页码:3303 / 3309
页数:7
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