NATURE OF VICINAL LASER-ANNEALED SI(111) SURFACES

被引：32
|
作者：
CHABAL, YJ
ROWE, JE
CHRISTMAN, SB
机构：
来源：
PHYSICAL REVIEW B | 1981年 / 24卷 / 06期
关键词：
D O I：
10.1103/PhysRevB.24.3303
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：3303 / 3309
页数：7
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