RF SPUTTERING OF ALXIN1-XN THIN-FILMS

被引：25
|
作者：
STAROSTA, K
机构：
来源：
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 1981年 / 68卷 / 01期
关键词：
D O I：
10.1002/pssa.2210680154
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：K55 / K57
页数：3
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