STERILIZATION BY ELECTRON-BEAM

被引：6

作者：

HANDLOS, V

机构：

来源：

RADIATION PHYSICS AND CHEMISTRY | 1981年 / 18卷 / 1-2期

关键词：

D O I：

10.1016/0146-5724(81)90074-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：175 / 182

页数：8

共 50 条

[41] ELECTRON-BEAM OSCILLOGRAPHS
LIPINSKI, K
ATM MESSTECHNISCHE PRAXIS, 1974, (464): : 163 - 164
[42] ELECTRON-BEAM LITHOGRAPHY
PEASE, RFW
CONTEMPORARY PHYSICS, 1981, 22 (03) : 265 - 290
[43] ELECTRON-BEAM MICROANALYSIS
BIGELOW, WC
MATERIALS RESEARCH AND STANDARDS, 1972, 12 (04): : 40 - &
[44] AURORA ELECTRON-BEAM
GRAYBILL, SE
BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1973, 18 (10): : 1264 - 1264
[45] ELECTRON-BEAM ECHO
HINTON, FL
KAWABE, T
PHYSICS OF FLUIDS, 1970, 13 (05) : 1212 - &
[46] ELECTRON-BEAM WELDING
SCHWARTZ, MM
WELDING RESEARCH COUNCIL BULLETIN, 1974, (196): : 1 - 60
[47] MODULATED ELECTRON-BEAM
ANDERSON, RA
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (04): : 1607 - 1607
[48] ELECTRON-BEAM LITHOGRAPHY
HERRIOTT, DR
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (03) : C102 - C102
[49] Electron-beam lithography
Harriott, L
Liddle, A
PHYSICS WORLD, 1997, 10 (04) : 41 - 45
[50] ELECTRON-BEAM MASKMAKER
BEASLEY, JP
SQUIRE, DG
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1975, ED22 (07) : 376 - 384