DEPENDENCE OF SEGREGATED MICROSTRUCTURE IN SPUTTER-DEPOSITED COCR FILM ON DEPOSITION CONDITIONS

被引：18
|
作者：
MASUYA, H [1 ]
AWANO, H [1 ]
机构：
[1] SONY CORP,INFORMAT SYST RES CTR,YOKOHAMA,KANAGAWA 240,JAPAN
来源：
IEEE TRANSACTIONS ON MAGNETICS | 1987年 / 23卷 / 05期
关键词：
D O I：
10.1109/TMAG.1987.1065612
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：2064 / 2066
页数：3
相关论文
共 50 条
  • [1] Effect of deposition conditions on mechanical stresses and microstructure of sputter-deposited molybdenum and reactively sputter-deposited molybdenum nitride films
    Shen, YG
    [J]. MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2003, 359 (1-2): : 158 - 167
  • [2] EFFECT OF ADDITION OF CARBON ON MAGNETIC-PROPERTIES OF SPUTTER-DEPOSITED COCR FILM
    AWANO, H
    MASUYA, H
    [J]. IEEE TRANSACTIONS ON MAGNETICS, 1987, 23 (05) : 2067 - 2069
  • [3] INFLUENCE OF DEPOSITION CONDITIONS ON SPUTTER-DEPOSITED AMORPHOUS SILICON
    PAWLEWICZ, WT
    [J]. JOURNAL OF APPLIED PHYSICS, 1978, 49 (11) : 5595 - 5601
  • [4] THE MICROSTRUCTURE OF SPUTTER-DEPOSITED COATINGS
    THORNTON, JA
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (06): : 3059 - 3065
  • [5] HYDRATION OF SPUTTER-DEPOSITED ALUMINA FILM
    KAWABE, T
    HANAZONO, M
    SONO, Y
    WAKI, M
    HARA, S
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (8B) : C431 - C431
  • [6] The effect of deposition regimes on the microstructure and emission properties of molecular sputter-deposited oxide
    Zhabin, G.A.
    Arkhipov, D.Yu.
    Temiryazeva, M.P.
    [J]. Applied Physics, 2019, (05): : 54 - 59
  • [7] The magnetic properties of sputter-deposited and annealed CoCr/CoCrPt recording media
    Yang, XF
    You, L
    Song, M
    Lin, GQ
    Li, ZY
    [J]. MATERIALS & DESIGN, 2006, 27 (03) : 223 - 225
  • [8] Microstructure of sputter-deposited strontium titanate films
    Nakahara, Shohei
    Kim, Deok-Yang
    Kim, Jae Jin
    Hwang, James C.M.
    [J]. Microscopy, 2011, 60 (02): : 133 - 142
  • [9] Microstructure of sputter-deposited strontium titanate films
    Nakahara, Shohei
    Kim, Deok-Yang
    Kim, Jae Jin
    Hwang, James C. M.
    [J]. JOURNAL OF ELECTRON MICROSCOPY, 2011, 60 (02): : 133 - 142
  • [10] Influence of deposition conditions on the composition, texture and microstructure of RF-magnetron sputter-deposited hydroxyapatite thin films
    Ivanova, A. A.
    Surmeneva, M. A.
    Surmenev, R. A.
    Depla, D.
    [J]. THIN SOLID FILMS, 2015, 591 : 368 - 374
12345