THE MICROSTRUCTURE OF SPUTTER-DEPOSITED COATINGS

被引：1098
|
作者：
THORNTON, JA [1 ]
机构：
[1] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 06期
关键词：
D O I：
10.1116/1.573628
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
下载
收藏
页码：3059 / 3065
页数：7
相关论文
共 50 条
  • [1] Reactively sputter-deposited titanium oxide coatings with parallel penniform microstructure
    Rodríguez, J
    Gómez, M
    Lu, J
    Olsson, E
    Granqvist, CG
    ADVANCED MATERIALS, 2000, 12 (05) : 341 - +
  • [2] Microstructure and corrosion resistance of sputter-deposited titanium-chromium alloy coatings
    Landolt, D
    Robyr, C
    Mettraux, P
    CORROSION, 1998, 54 (10) : 772 - 780
  • [3] Sputter-deposited Al-Au coatings
    Mitterer, C
    Lenhart, H
    Mayhofer, PH
    Kathrein, M
    INTERMETALLICS, 2004, 12 (05) : 579 - 587
  • [4] Sodium superionic conductor sputter-deposited coatings
    D. Horwat
    A. Billard
    Ionics, 2005, 11 : 120 - 125
  • [5] Sodium superionic conductor sputter-deposited coatings
    Horwat, D
    Billard, A
    IONICS, 2005, 11 (1-2) : 120 - 125
  • [6] Microstructure of sputter-deposited strontium titanate films
    Nakahara, Shohei
    Kim, Deok-Yang
    Kim, Jae Jin
    Hwang, James C.M.
    Microscopy, 2011, 60 (02): : 133 - 142
  • [7] Microstructure of sputter-deposited strontium titanate films
    Nakahara, Shohei
    Kim, Deok-Yang
    Kim, Jae Jin
    Hwang, James C. M.
    JOURNAL OF ELECTRON MICROSCOPY, 2011, 60 (02): : 133 - 142
  • [8] Microstructure and mechanical, electrical, and electrochemical properties of sputter-deposited multicomponent (TiNbZrTa)Nx coatings
    Shu, Rui
    Paschalidou, Eirini-Maria
    Rao, Smita G.
    Lu, Jun
    Greczynski, Grzegorz
    Lewin, Erik
    Nyholm, Leif
    le Febvrier, Arnaud
    Eklund, Per
    SURFACE & COATINGS TECHNOLOGY, 2020, 389
  • [9] SPUTTER-DEPOSITED ZIRCONIA-ALUMINA NANOLAMINATE COATINGS
    AITA, CR
    SCANLAN, CM
    GAJDARDZISKAJOSIFOVSKA, M
    JOM-JOURNAL OF THE MINERALS METALS & MATERIALS SOCIETY, 1994, 46 (10): : 40 - 42
  • [10] SPUTTER-DEPOSITED MULTILAYERED CERAMIC-METAL COATINGS
    PATTEN, JW
    BAYNE, MA
    HAYS, DD
    MOSS, RW
    MCCLANAHAN, ED
    FAIRBANKS, JW
    THIN SOLID FILMS, 1979, 64 (02) : 337 - 343
12345