METALORGANIC CHEMICAL VAPOR-DEPOSITION OF ORIENTED ZNO FILMS

被引:9
|
作者
KAUFMANN, T [1 ]
FUCHS, G [1 ]
WEBERT, M [1 ]
机构
[1] TECH ELEKTR BAUELEMENTE,ILMENAU,GER DEM REP
关键词
D O I
10.1002/crat.2170230511
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
收藏
页码:635 / 639
页数:5
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