共 50 条
- [31] A contribution to the expansion of the applicability of electrostatic forces in micro transducers MOEMS AND MINIATURIZED SYSTEMS XVI, 2017, 10116
- [34] A CONTRIBUTION TO THEORY OF ELECTROACOUSTIC TRANSDUCERS BASED ON ELECTROSTATIC PRINCIPLE ACUSTICA, 1967, 19 (05): : 283 - &
- [36] Experimental Characterization of the Electrostatic Levitation Force in MEMS Transducers JOURNAL OF VIBRATION AND ACOUSTICS-TRANSACTIONS OF THE ASME, 2020, 142 (04):
- [37] Theoretical simulation of the behavior of micromachined electrostatic ultrasonic transducers THEORETICAL AND COMPUTATIONAL ACOUSTICS 2001, 2002, : 459 - 469
- [38] SIMPLE ELECTROSTATIC TRANSDUCERS FOR HIGH-FREQUENCY SOUNDS JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 1970, 48 (01): : 126 - &
- [39] BROAD-BAND ELECTROSTATIC TRANSDUCERS - MODELING AND EXPERIMENTS JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 1995, 97 (01): : 262 - 272
- [40] Experimental investigation of electrostatic ultrasonic transducers with grooved backplates 1997 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 & 2, 1997, : 1003 - 1006