REACTIVELY SPUTTERED NITRIDES AND CARBIDES OF TITANIUM, ZIRCONIUM, AND HAFNIUM

被引：86
|
作者：
SPROUL, WD
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 06期
关键词：
D O I：
10.1116/1.573651
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：2874 / 2878
页数：5
相关论文
共 50 条
  • [31] OXIDATION OF TITANIUM, ZIRCONIUM, AND HAFNIUM
    WALLWORK, GR
    JENKINS, AE
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1958, 105 (08) : C159 - C159
  • [32] Physical properties of high pressure reactively sputtered hafnium oxide
    Toledano-Luque, M.
    Martinez, F. L.
    Andres, E. San
    del Prado, A.
    Martil, I.
    Gonzalez-Diaz, G.
    Bohne, W.
    Roehrich, J.
    Strub, E.
    [J]. VACUUM, 2008, 82 (12) : 1391 - 1394
  • [33] EROSION PROPERTIES OF REACTIVELY SPUTTERED TITANIUM CARBONITRIDES
    GENTILE, RF
    CHIN, KK
    DONAGHEY, LF
    [J]. PLANSEEBERICHTE FUR PULVERMETALLURGIE, 1978, 26 (03): : 172 - 180
  • [34] Atomic layer deposition of insulating hafnium and zirconium nitrides
    Becker, JS
    Kim, E
    Gordon, RG
    [J]. CHEMISTRY OF MATERIALS, 2004, 16 (18) : 3497 - 3501
  • [35] Structure and electronic properties of zirconium and hafnium nitrides and oxynitrides
    Bazhanov, DI
    Knizhnik, AA
    Safonov, AA
    Bagatur'yants, AA
    Stoker, MW
    Korkin, AA
    [J]. JOURNAL OF APPLIED PHYSICS, 2005, 97 (04)
  • [36] Structure and electronic properties of zirconium and hafnium nitrides and oxynitrides
    Bazhanov, D.I.
    Knizhnik, A.A.
    Safonov, A.A.
    Bagatur'yants, A.A.
    Stoker, M.W.
    Korkin, A.A.
    [J]. Journal of Applied Physics, 2005, 97 (04):
  • [37] On the lattice parameters of carbides and nitrides of titanium and vanadium
    Dawihl, W
    Rix, W
    [J]. ZEITSCHRIFT FUR ANORGANISCHE UND ALLGEMEINE CHEMIE, 1940, 244 (02): : 191 - 197
  • [38] Catalytic activity of coatings of nitrides and carbides of titanium and zirconium in reactions of oxidation of CH4 and CO
    Tsybulev, P.N.
    Serdyuk, G.N.
    Molchanovskij, I.A.
    Parkhomenko, V.D.
    Obushenko, T.I.
    Knyazev, Yu.V.
    Solov'ev, S.A.
    [J]. Jianzhu Jiegou Xuebao/Journal of Building Structures, 1998, 19 (06): : 105 - 109
  • [39] FEATURES OF THE FORMATION OF ZIRCONIUM AND HAFNIUM CARBIDES IN FIBROUS MATERIALS
    ULYANOVA, TM
    ERMOLENKO, IN
    IVASHKEVICH, LS
    VITYAZ, PA
    FEDOROVA, IL
    [J]. INORGANIC MATERIALS, 1989, 25 (01) : 30 - 34
  • [40] One-step process of synthesis of ceramics of desired shape based on titanium, zirconium, and hafnium nitrides
    Kuznetsov K.B.
    Shokodko A.V.
    Ashmarin A.A.
    Ogarkov A.I.
    Shashkeev K.A.
    Shevtsov S.V.
    Chernyavskii A.S.
    Solntsev K.A.
    [J]. Inorganic Materials: Applied Research, 2015, 6 (05) : 521 - 527
12345