REACTIVELY SPUTTERED NITRIDES AND CARBIDES OF TITANIUM, ZIRCONIUM, AND HAFNIUM

被引：86
|
作者：
SPROUL, WD
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 06期
关键词：
D O I：
10.1116/1.573651
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：2874 / 2878
页数：5
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