FEATURES OF DEEP LOCAL ETCHING OF SILICON STRUCTURES IN HF HNO3 CH3COOH COMPOSITIONS

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作者：
IZIDINOV, SO
GAPONENKO, VI
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来源：
JOURNAL OF APPLIED CHEMISTRY OF THE USSR | 1990年 / 63卷 / 06期
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O69 [应用化学];
学科分类号：
081704 ;
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页码：1160 / 1164
页数：5
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