ANGULAR-DISTRIBUTION OF SPUTTERED ATOMS FROM POLYCRYSTALLINE METAL TARGETS

被引：60
|
作者：
TSUGE, H
ESHO, S
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1981年 / 52卷 / 07期
关键词：
D O I：
10.1063/1.329365
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：4391 / 4395
页数：5
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