X-RAY ANALYSIS OF TANTALUM FILMS TRIODE-SPUTTERED IN ARGON-OXYGEN MIXTURES

被引：19
|
作者：
WESTWOOD, WD [1 ]
机构：
[1] BELL TEL CO INC,NO RES,OTTAWA,ONTARIO,CANADA
来源：
THIN SOLID FILMS | 1973年 / 15卷 / 01期
关键词：
D O I：
10.1016/0040-6090(73)90200-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：15 / 30
页数：16
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