VALENCE-BAND SPECTRA OF HYDROGENATED DIAMOND (111) SURFACE

被引:9
|
作者
YAMAMOTO, K
SUEHARA, S
ANDO, T
HISHITA, S
KAMO, M
SATO, Y
机构
[1] National Institute for Research in Inorganic Materials, Tsukuba, Ibaraki, 305
关键词
SPECTROSCOPY; SURFACE CHARACTERIZATION; HOMOEPITAXY; MICROWAVE PLASMA CVD;
D O I
10.1016/0925-9635(94)05326-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Boron-doped semiconducting diamond thin films were epitaxially grown on a natural diamond (111) single crystal by microwave-plasma-assisted chemical vapor deposition. We investigated chemisorption of hydrogen on the diamond surface by X-ray photoemission spectroscopy measurements and first-principles molecular orbital calculations. By comparison between the experimental and calculated spectra, we conclude that hydrogen termination of the epitaxially grown diamond (111) surface is in the form of the CH3 group.
引用
收藏
页码:520 / 523
页数:4
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