METALORGANIC CHEMICAL VAPOR-DEPOSITION OF YBA2CU3O7-X USING A SPECIAL EQUIPMENT FOR SOLID PRECURSORS

被引：7
|
作者：
SANT, C
GIBART, P [1 ]
GENOU, P
VERIE, C
机构：
[1] CNRS,LPSES,RUE BERNARD GREGORY,SOPHIA ANTIPOLIS,F-06560 VALBONNE,FRANCE
[2] EFEREL SA,F-78640 NEAUPHLE CHATEAU,FRANCE
来源：
JOURNAL OF CRYSTAL GROWTH | 1992年 / 124卷 / 1-4期
关键词：
D O I：
10.1016/0022-0248(92)90537-S
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
YBaCuO thin films here grown by chemical vapour deposition using Y(dpm)3, Ba(dpm)2 and Cu(acac)2 as metal precursors. A specific design of the solid precursor processing system was developed to achieve run-to-run reproducibility. A superconducting transition was observed with T(c) onset = 94 K and T(c)(R = 0) = 92 K for as-grown layers cooled in O2 for YBa2Cu3O7-x films deposited on {100}SrTiO3 substrates.
引用
收藏
页码：690 / 696
页数：7
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