COMBINED MOS AND RADIOCHEMICAL ANALYSIS OF IMPURITIES IN SIO2 ON SI

被引：13
|
作者：
KUPER, AB
机构：
来源：
SURFACE SCIENCE | 1969年 / 13卷 / 01期
关键词：
D O I：
10.1016/0039-6028(69)90246-5
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：172 / +
页数：1
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