HIGH-PRECISION SURFACE SHAPE TESTING BY MEANS OF AN INTERFEROMETRIC SENSOR

被引：1
|
作者：
HEIMBECK, HJ [1 ]
ELSSNER, KE [1 ]
VOGEL, A [1 ]
机构：
[1] BERLINER INST OPT GMBH,DEPT OPT METROL,D-12484 BERLIN,GERMANY
来源：
OPTICAL ENGINEERING | 1995年 / 34卷 / 09期
关键词：
INTERFEROMETRY; ABSOLUTE CALIBRATION; OPTICAL SHOP; MANUFACTURING TECHNOLOGY; FLATNESS; SPHERICITY; CYLINDRICITY;
D O I：
10.1117/12.205674
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Testing of surface shapes by automatic interferometry is exact, fast, and comfortable, and therefore popular, It however suffers from drawbacks: the equipment is often quite voluminous and expensive, and the attainable accuracy is limited by the precision of the reference surface (relative testing). Using the phase-shift software of BIFO, which has been improved over the years, Fisba Optik AG recently developed a matchbox-sized, cost-reduced interferometric surface shape sensor to overcome the first drawback. Furthermore, this sensor was combined with methods for absolute calibration to solve the reference-surface problem.
引用
收藏
页码：2719 / 2723
页数：5
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