ELECTRON-ENERGY DISTRIBUTIONS AND KINETIC TEMPERATURES IN HIGH-FREQUENCY ARGON DISCHARGES

The electron energy distribution functions and kinetic temperatures in argon discharges at low pressures under the action of a uniform high-frequency electric field are calculated by numerically solving the homogeneous Boltzmann equation. The calculation covers the whole range from low electron densities to sufficiently high electron densities. The influence of electron-electron collisions on the electron energy distribution functions and kinetic temperatures for various amplitudes and frequencies of the HF electric field and degrees of ionization is investigated.