ELECTRON-ENERGY DISTRIBUTIONS AND KINETIC TEMPERATURES IN HIGH-FREQUENCY ARGON DISCHARGES

被引：2

作者：

WANG, DZ

MA, TC

GUO, BH

机构：

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1993年 / 26卷 / 01期

关键词：

D O I：

暂无

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The electron energy distribution functions and kinetic temperatures in argon discharges at low pressures under the action of a uniform high-frequency electric field are calculated by numerically solving the homogeneous Boltzmann equation. The calculation covers the whole range from low electron densities to sufficiently high electron densities. The influence of electron-electron collisions on the electron energy distribution functions and kinetic temperatures for various amplitudes and frequencies of the HF electric field and degrees of ionization is investigated.

引用

页码：62 / 65

页数：4

共 50 条

[1] ELECTRON-ENERGY DISTRIBUTIONS AND EXCITATION RATES IN HIGH-FREQUENCY ARGON DISCHARGES
FERREIRA, CM
LOUREIRO, J
[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1983, 16 (12) : 2471 - 2483
[2] EXPERIMENTAL ELECTRON-ENERGY DISTRIBUTIONS FOR TOWNSEND DISCHARGES IN ARGON GAS
LOSEE, JR
BURCH, DS
[J]. PHYSICAL REVIEW A, 1972, 6 (04): : 1652 - &
[3] ELECTRON-ENERGY DISTRIBUTION IN ELECTRIC HIGH-FREQUENCY FIELD
TSENDIN, LD
[J]. ZHURNAL TEKHNICHESKOI FIZIKI, 1977, 47 (08): : 1598 - 1603
[4] ELECTRON-ENERGY DISTRIBUTION FUNCTION AND ATOM IONIZATION PROCESSES IN HIGH-FREQUENCY DISCHARGE MERCURY ARGON PLASMA
WAGNER, SD
NISCONEN, IS
[J]. JOURNAL DE PHYSIQUE, 1979, 40 : 209 - 210
[5] ELECTRON-ENERGY DISTRIBUTIONS AND TRANSPORT PARAMETERS OF DIRECT-CURRENT ARGON DISCHARGES AT LOW-PRESSURES
WANG, DZ
TENGCAI, M
[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1991, 24 (08) : 1367 - 1370
[6] DETERMINATION OF ELECTRON-ENERGY DISTRIBUTIONS IN DISCHARGES WITH SECONDARY PLASMA PARTS
BERGER, E
HEISEN, A
[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1975, 8 (06) : 629 - 639
[7] CORRECT MEASUREMENTS OF ELECTRON-ENERGY DISTRIBUTION FUNCTION IN HIGH-FREQUENCY PLASMA
GODYAK, VA
OKS, SN
[J]. ZHURNAL TEKHNICHESKOI FIZIKI, 1979, 49 (07): : 1408 - 1411
[8] ELECTRON-ENERGY DISTRIBUTION IN HIGH-FREQUENCY DISCHARGE OF LOW-PRESSURE
GODYAK, VA
OKS, SN
[J]. ZHURNAL TEKHNICHESKOI FIZIKI, 1979, 49 (10): : 2265 - 2268
[9] Very high-frequency capacitively coupled argon discharges
Colgan, M. J.
Meyyappan, M.
Murnick, D. E.
[J]. PLASMA SOURCES SCIENCE & TECHNOLOGY, 1994, 3 (02):
[10] ELECTRON-ENERGY DISTRIBUTIONS IN ELECTRON-CYCLOTRON RESONANCE DISCHARGES FOR MATERIALS PROCESSING
WENG, YL
KUSHNER, MJ
[J]. JOURNAL OF APPLIED PHYSICS, 1992, 72 (01) : 33 - 42

← 1 2 3 4 5 →