Development of a Spherically Focused Capacitive-film Air-coupled Ultrasonic Transducer

被引：0
|
作者：
Song, Junho [1 ]
Chimenti, Dale E. [2 ]
机构：
[1] Iowa State Univ, Ctr Nondestruct Evaluat, Ames, IA 50011 USA
[2] Iowa State Univ, Dept Aerosp Engn, Ames, IA 50011 USA
来源：
JOURNAL OF THE KOREAN SOCIETY FOR NONDESTRUCTIVE TESTING | 2005年 / 25卷 / 06期
关键词：
spherical; focused; air-coupled; capacitive; ultrasound transducer;
D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
We have built a spherically focused, not using acoustic mirrors, capacitive micromachined air-coupled ultrasonic transducer. A flexible backplate of a copper/polyimide backplate is used, permitting it to conform to a spherically shaped substrate. The backplate is patterned with 40-mu m depressions having 80-mu m center-to-center spacing. A 6-mu m thick aluminized Mylar film completing the transducer is deformed to allow it to conform to the spherical backplate. The device's frequency spectrum is centered at 805 kHz with -6 dB points at 440 and 1210 kHz.
引用
收藏
页码：446 / 450
页数：5
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