ELECTRON-PROBE MICROANALYSIS OF MULTILAYER STRUCTURES

被引：0
|
作者：
MATVIENKO, AN
SAVIN, DO
MAGOMEDOV, ZA
NAZARENKO, AV
机构：
[1] ALL UNION PHYSICOTECH & RADIOENGN MEASUREMENT RES INST,MOSCOW,USSR
[2] KONTEKH SCI IND PROD,MOSCOW,USSR
来源：
IZVESTIYA AKADEMII NAUK SSSR SERIYA FIZICHESKAYA | 1992年 / 56卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
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页码：132 / 137
页数：6
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