HVEM AND HREM STUDY OF SIMOX STRUCTURES

被引：0
|
作者：
DEVEIRMAN, A
YALLUP, K
VANLANDUYT, J
MAES, HE
机构：
[1] RAHEEN IND ESTATE,LIMERICK,IRELAND
[2] INTERUNIV MICROELECTR CENTRUM,B-3030 LEUVEN,BELGIUM
[3] ANTWERP STATE UNIV CTR,B-2020 ANTWERP,BELGIUM
来源：
JOURNAL DE MICROSCOPIE ET DE SPECTROSCOPIE ELECTRONIQUES | 1988年 / 13卷 / 03期
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：A38 / A38
页数：1
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