COMPARISON OF BACKSCATTERING PARAMETERS USING HIGH-ENERGY OXYGEN AND HELIUM IONS

被引：26
|
作者：
PETERSSON, S
TOVE, PA
MEYER, O
SUNDQVIST, B
JOHANSSON, A
机构：
[1] INST TECHNOL, 75121 UPPSALA, SWEDEN
[2] TANDEM ACCELERATOR LAB, 75121 UPPSALA, SWEDEN
来源：
THIN SOLID FILMS | 1973年 / 19卷 / 01期
关键词：
D O I：
10.1016/0040-6090(73)90032-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：157 / 164
页数：8
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