SIMULTANEOUS DETECTION OF LIGHT-ELEMENTS BY ERDA WITH GAS-IONIZATION SI DELTA-E-E DETECTOR TELESCOPE

被引：30
|
作者：
AVASTHI, DK
KABIRAJ, D
BHAGWAT, A
MEHTA, GK
VANKAR, VD
OGALE, SB
机构：
[1] INDIAN INST TECHNOL,DEPT PHYS,NEW DELHI 110016,INDIA
[2] UNIV POONA,DEPT PHYS,POONA 411007,MAHARASHTRA,INDIA
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1994年 / 93卷 / 04期
关键词：
D O I：
10.1016/0168-583X(94)95637-5
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Elastic Recoil Detection Analysis (ERDA) using DELTAE-E telescope with gaseous DELTAE detector is carried out for the first time for simultaneous detection of H alongwith other light elements C, N, and O in Diamondlike Carbon (DLC) films. The experimental data indicated the detection limit of 0.002 at.% for H and 0.006 at.% for N and O with 10% statistical inaccuracy.
引用
收藏
页码：480 / 484
页数：5
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