COPPER-BASED MATERIALS FORMED BY HIGH-RATE SPUTTERING

被引：3
|
作者：
BUSCH, R
MCCLANAHAN, ED
机构：
来源：
THIN SOLID FILMS | 1977年 / 47卷 / 03期
关键词：
D O I：
10.1016/0040-6090(77)90044-X
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：291 / 306
页数：16
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