RADIATION-ENHANCED DIFFUSION OF BORON IN GERMANIUM DURING ION-IMPLANTATION

被引：12
|
作者：
GUSEVA, MI [1 ]
MANSUROVA, AN [1 ]
机构：
[1] KURCHATOV ATOM ENERGY INST, KURCHATOV SQ, MOSCOW, USSR
来源：
RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1973年 / 20卷 / 03期
关键词：
D O I：
10.1080/00337577308232285
中图分类号：
TL [原子能技术]; O571 [原子核物理学];
学科分类号：
0827 ; 082701 ;
摘要：
引用
收藏
页码：207 / 210
页数：4
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