Moisture Gettering by Porous Alumina Films on Textured Silicon Wafer

被引：1
|
作者：
Lim, Hyo Ryoung [1 ]
Eom, Nu Si A. [1 ]
Cho, Jeong-Ho [2 ]
Choa, Yong-Ho [1 ]
机构：
[1] Hanyang Univ, Dept Fus Chem Engn, 1271 Sa 3 Dong, Hanyang Uniyersift 426791, Gyeonggi, South Korea
[2] Korea Inst Ceram Engn & Technol, Elect Components Ctr, Seoul 153801, South Korea
来源：
KOREAN CHEMICAL ENGINEERING RESEARCH | 2015年 / 53卷 / 03期
关键词：
Getter; Moisture Adsorption; Solution Process; Anodizing; Anodic Aluminum Oxide;
D O I：
10.9713/kcer.2015.53.3.401
中图分类号：
TQ [化学工业];
学科分类号：
0817 ;
摘要：
Getter is a class of materials used in absorbing gases such as hydrogen and moisture in microelectronics or semiconductor devices to operate properly. In this study, we developed a new device structure consisting of porous anodized alumina films on textured silicon wafer, which have cost efficiency in materials and processing aspects. Anodic aluminum oxide (AAO) with controlled pore sizes can be applied to a high-efficiency moisture absorber due to the high surface area and OH- saturated surface property. The moisture sorption capacity was 2.02% (RH=35%), obtained by analyzing isothermal adsorption/desorption curve.
引用
收藏
页码：401 / 406
页数：6
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