MEASUREMENT OF MICROTOPOGRAPHY - 3-D MEASURING SEM METHOD

被引：0
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作者：
TAGUCHI, Y
机构：
来源：
JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS | 1990年 / 35卷 / 11期
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中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
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页码：814 / 818
页数：5
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