EFFECTS OF OXYGEN IN ION-BEAM SPUTTER DEPOSITION OF VANADIUM-OXIDE

被引：32
|
作者：
CHAIN, EE [1 ]
机构：
[1] LTV MISSILES & ELECTR GROUP, DIV MISSILES, DALLAS, TX 75265 USA
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1987年 / 5卷 / 04期
关键词：
D O I：
10.1116/1.574510
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：1836 / 1839
页数：4
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