MESOSCOPIC ROUGHNESS CHARACTERIZATION OF GROWN SURFACES BY ATOMIC-FORCE MICROSCOPY

被引：27
|
作者：
YOSHINOBU, T
IWAMOTO, A
IWASAKI, H
机构：
[1] The Institute of Scientific and Industrial Research, Osaka University, Ibaraki, Osaka, 567
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1994年 / 33卷 / 1A期
关键词：
METROLOGY; ROUGHNESS; FRACTAL; SELF-AFFINE; SURFACE; AFM; ATOMIC FORCE MICROSCOPY; GROWTH; DISSOLUTION;
D O I：
10.1143/JJAP.33.L67
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Mesoscopic roughness of material surfaces grown on (or dissolved from) flat substrates is described in terms of its scale dependence. It is demonstrated that three parameters, including the characteristic correlation length and the anisotropy exponent of scaling, in addition to the scale independent rms roughness on long length scales, describe well the scaling behavior of roughness. A procedure to derive these parameters from atomic force microscopy data is also discussed.
引用
收藏
页码：L67 / L69
页数：3
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