IONIC FLUX DISTRIBUTIONS FOR THE VACUUM-ARC DEPOSITION OF DIAMOND-LIKE FILMS

被引：0
|
作者：
DEAZEVEDO, MD
MEUNIER, JL
机构：
来源：
CHEMICAL ENGINEERING SCIENCE | 1990年 / 45卷 / 08期
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中图分类号：
TQ [化学工业];
学科分类号：
0817 ;
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页码：2475 / 2481
页数：7
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