Control of Glass Infiltration at the Al2O3/Glass/Al2O3 Interface

A zero-shrinkage sintering process in which the shrinkage of the x-y axis is controlled to be zero is in great demand due to the high integration trend in ceramic modules. Among the zero-shrinkage sintering processes available, the glass infiltration method proposed in the preliminary study with an Al2O3/ Glass/ Al2O3 structure is one promising method. However, problems exist in regard to the glass infiltration method, including partially incomplete joining between Al2O3 and glass layers due to the precipitate of Ti-Pb rich phase during the sintering process. Therefore, we wish to solve the de-lamination problems and suggest a mechanism for delamination and the solutions in the zeroshrinkage low temperature co-fired ceramic (LTCC) layers. The de-lamination problems diminished using the Pb-BSi- O glass without TiO2 in Pb-B-Ti-Si-O glass and produced a very dense zero-shrinkage LTCC.