THE DEPENDENCE OF COATING IN INDUCTIVE RF PLASMAS ON GAS-FLOW VELOCITY, PRESSURE AND RF POWER

被引：17
|
作者：
KHAIT, YL [1 ]
INSPEKTOR, A [1 ]
AVNI, R [1 ]
机构：
[1] NUCL RES CTR NEGEV,DIV CHEM,BEERSHEBA,ISRAEL
来源：
THIN SOLID FILMS | 1980年 / 72卷 / 02期
关键词：
D O I：
10.1016/0040-6090(80)90006-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：249 / 260
页数：12
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