CHARACTERIZATION OF INN, IN2O3, AND IN OXY-NITRIDE SEMICONDUCTING THIN-FILMS USING XPS ELECTRON-ENERGY LOSS SPECTRA

被引：12
|
作者：
BARR, TL
NATARAJAN, BR
ELTOUKHY, AH
GREENE, JE
机构：
[1] UNIV ILLINOIS,DEPT COORDINATED SCI LAB,URBANA,IL 61801
[2] UNIV ILLINOIS,DEPT MET,URBANA,IL 61801
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 02期
关键词：
D O I：
10.1116/1.570024
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：517 / 517
页数：1
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