FIRST 20 YEARS OF AMERICAN-VACUUM-SOCIETY

被引：8

|

作者：

SCHLEUNI.HW

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1973年 / 10卷 / 05期

关键词：

D O I：

10.1116/1.1318438

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：833 / 842

页数：10

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