ELLIPSOMETRIC SPECTROSCOPY OF PURE AND OF OXYGEN AND CARBON MONOXIDE-COVERED COPPER-FILMS

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作者
GARTNER, M
STANICA, N
VASS, M
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O6 [化学];
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0703 ;
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Spectroscopic ellipsometric measurements (0.3-0.7-mu-m) have been performed on clean and on oxygen - and carbon monoxide-covered copper films in a high vacuum system. The complex dielectric functions of the clean surfaces were calculated from measurements at room temperature and used for indexing the interband transitions in the UV - VIS range. The adsorption of oxygen was investigated in the 10(-6) - 10(-5) torr range and at film temperatures ranging within 296-603 K. The reaction of carbon monoxide with preadsorbed oxygen on the copper film was also investigated at 543 K. Another point of interset was the interaction of carbon monoxide with clean copper film at 77 K.
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页码:713 / 720
页数:8
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