TOTAL-REFLECTION X-RAY-FLUORESCENCE SPECTROSCOPY FOR IN-SITU, REAL-TIME ANALYSIS OF GROWING FILMS

被引：7
|
作者：
ROBERTS, TA
GRAY, KE
机构：
[1] ARGONNE NATL LAB,DIV MAT SCI,ARGONNE,IL 60439
[2] CTR NAVAL ANAL,ALEXANDRIA,VA
来源：
MRS BULLETIN | 1995年 / 20卷 / 05期
关键词：
D O I：
10.1557/S0883769400044882
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：43 / 46
页数：4
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