MEASUREMENTS OF THERMAL-CONDUCTIVITY OF DIAMOND FILMS BY PHOTOTHERMAL DEFLECTION TECHNIQUE

被引：35
|
作者：
BERTOLOTTI, M
LIAKHOU, GL
FERRARI, A
RALCHENKO, VGF
SMOLIN, AA
OBRAZTSOVA, E
KOROTOUSHENKO, KG
PIMENOV, SM
KONOV, VI
机构：
[1] TECH UNIV MOLDOVA,KISHINEV 277012,MOLDOVA
[2] UNIV ROMA LA SAPIENZA,DIPARTIMENTO ELETTRON,I-00185 ROME,ITALY
[3] RUSSIAN ACAD SCI,INST GEN PHYS,MOSCOW 117942,RUSSIA
来源：
JOURNAL OF APPLIED PHYSICS | 1994年 / 75卷 / 12期
关键词：
D O I：
10.1063/1.356585
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The photothermal deflection technique has been used for contactless measurements of the thermal conductivity of thin polycrystalline diamond films grown in a dc arc discharge in different CH4/H-2 mixtures. The thermal conductivity correlates inversely with amorphous sp2 carbon content in the films. Values of thermal conductivity in the range 2-5 W/cm K were obtained for approximately 10-mum-thick diamond films deposited from gas mixtures containing methane percentages varying from 3% to 9%.
引用
收藏
页码：7795 / 7798
页数：4
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