STUDY OF THE STRUCTURE AND ORIENTATION OF EPITAXIAL RE-BA-CU-O (RE = Y, ER, HO, GD, SM) SUPERCONDUCTING THIN-FILMS

Epitaxial Re-Ba-Cu-O (Re = Y, Er, Ho, Gd, Sm) superconducting thin films with J(c) (77 K) = 1.4 X 10(6) A/cm2 for YBa2Cu3O7-x have been prepared using a modified planar DC magnetron sputtering system. The structure and the orientation of the epitaxial thin films were examined by x-ray diffraction and reflection high-energy electron-diffraction technique. Owing to the difference in substrate orientation, substrate temperature and partial pressure of oxygen, there exist four possible epitaxial orientation tendencies for Re-Ba-Cu-O thin films grown on (100) and (110) SrTiO3 substrates. The results are discussed.