SURFACE SEGREGATION IN III-V ALLOYS

被引:85
|
作者
MOISON, JM [1 ]
HOUZAY, F [1 ]
BARTHE, F [1 ]
GERARD, JM [1 ]
JUSSERAND, B [1 ]
MASSIES, J [1 ]
TURCOSANDROFF, FS [1 ]
机构
[1] LAB PHYS SOLIDE & ENERGIE SOLAIRE, F-06560 VALBONNE, FRANCE
关键词
D O I
10.1016/0022-0248(91)90962-5
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Recent measurements which demonstrate the occurrence of surface segregation during the MBE growth of III(a)III(b)-V ternary semiconductor alloys and III(a)-V/III(b)-V heterostructures are reviewed. This preferential segregation drives to the surface one of the third-column elements involved, to the expense of the other, within their common sublattice. In ternary alloys, the surface is found to be nearly binary, and a short-scale interface roughness is detected in heterostructures. For arsenides, the direction and extent of the segregation process follow the In > Ga greater-than-or-equal-to Al order. We discuss possible origins for the segregation process and the ability of standard segregation models to describe the results on ternary alloys and to predict composition profiles for any given heterostructure. These predictions are compared to recent measurements by high-resolution microscopy, ion scattering, photo-luminescence, or Raman scattering. Possible applications of the segregation process, and also remedies for avoiding it are finally discussed.
引用
收藏
页码:141 / 150
页数:10
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