SPRAYED SNO2 FILMS - GROWTH-MECHANISM AND FILM STRUCTURE CHARACTERIZATION

被引：7
|
作者：
SANZMAUDES, J [1 ]
RODRIGUEZ, T [1 ]
机构：
[1] CIUDAD UNIV MADRID,ESCUELA TECH SUPER INGN IND,SEMICOND LAB,MADRID 3,SPAIN
来源：
THIN SOLID FILMS | 1980年 / 69卷 / 02期
关键词：
D O I：
10.1016/0040-6090(80)90035-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：183 / 189
页数：7
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