PRECISION MASK CHANGER FOR ULTRAHIGH VACUUM SYSTEMS

被引：0
|
作者：
SEITCHIK, JA
STEIN, BF
GOLDBERG, N
机构：
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1968年 / 39卷 / 04期
关键词：
D O I：
10.1063/1.1683409
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：469 / &
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