SPUTTER DEPOSITION IN ULTRAHIGH-VACUUM SYSTEMS

被引：0
|
作者：
FISCHER, H
PETER, G
KOPRIO, JA
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 03期
关键词：
D O I：
10.1116/1.575197
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
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页码：2109 / 2110
页数：2
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